Home > Equipment & Processes > FIB - Finding Eucentric

Finding Eucentric

  1. Place top of sample at "15mm" yellow marker.

  2. Focus @ 2000+ X magnification on some horizontal feature in the area of interest.

  3. Link Z to FWD.

  4. Adjust the Tilt Angle with small, incremental changes (2o, 5o, 10o, 25o, 52o).  With each incremental change in Tilt, adjust the Stage Height (Z-Knob) to bring the horizontal feature back to the cross-hair.

  5. Repeat this procedure until 0o (ctrl-E) and 52o (ctrl-I) remain within a couple of microns of your horizontal feature.

  6. With the sample normal to the Ion Beam, make Ion Beam image coincident with the E-beam image by adjusting the Ion Beam's Beam Shift.