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NFC Equipment and Process List

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Process rates 7/07 - 6/08

View equipment and process notes using a map of the lab.


lessE-Beam, Ion Beam and Mask Making


lessOptical Photolithography
      Process info for this section



lessChemical Vapor Deposition
  • LPCVD - Low pressure convection vapor deposition system (coral names: tube32-poly, tube33-nitride, tube 34-lto)
    • Tube 32 is the Poly deposition tube, which is for both N or P type doped Poly or undoped Poly.
    • Tube 33 is a Low Stress Nitride and regular Nitride process tube.
    • Tube 34 is a Low Temperature Oxide tube for both undoped and N and P doped films: LTO, PSG, BPSG.
    • Tube 31 is not yet running, but will be able to do 6" (150 mm) or 4" wafers for Low Stress Nitride process.
    • SOP  [  PDF 424kB]

  • PECVD - Plasma enhanced convention vapor deposition system (coral name: pecvd)


lessMetalization and Sputtering


lessDry Etching


lessAnnealing, Oxidation and Doping
  • Tylan Furnace Bank - Atmosphere oxidation system (coral names: tube21-ht-oxide, tube22-gate-oxide, tube23-gen-oxide, tube24-alloy)

  • RTA-1 - Rapid thermal annealing system (coral name: rta-1)


lessWafer Bonding, Polishing and Sawing
  • CMP-Oxide - Chemical mechanical polishing for oxides only system (coral name: cmp-oxide)
    • The system is limited in the films it can process.  The films are Oxide, Poly, and Nitride only.  NO METALS  Contact the process specialist before planning to use the system.

  • Wafer Saw - Wafer cutting system (coral name: wafersaw)

  • SB6 - Wafer Bonding system (coral name: sb6)


lessCharacterization and Testing
  • AFM - Atomic force microscope measuring tool (coral name: afm-1)

  • CV-IV - Capacitance voltage-current coltage system (coral name: cviv)

  • Gaertner Ellipsometer - Laser based measuring system (coral name: ellipsometer-g)

  • Rudolph Ellipsometer - Laser based measuring system (coral name: ellipsometer-r)

  • Four Point Probe - Thin film or surface sheet resistance measuring system (coral name: four-point-probe)

  • Nanospec-1 - Dielctric film thickness measuring system model 200 (coral name: nanospec-1)

  • Nanospec-2 - Dielctric film thickness measuring system model 200 (coral name: nanospec-2)

  • Stress Test-1 - Wafer stress or warpage system (coral name: stresstest-1)
    • SOP
    • Excel spreadsheet to calculate stress independent of the FSM from the generated 'radius of curvature' data.

  • Dektak - Profilometer measuring system (coral name: surface-prof)


Please refer to the Shortcourse Instructor List to contact the instructor/specialist for more information regarding any equipment.