PhotoLithography Shortcourse Information

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Introduction to Photolithography

SOPs

Required		As needed
-- Contact Aligners        MA-6        MA-BA-6               Front to back aligning -- Hotplates        Pre-bake        Hard-bake        Soft-bake -- Spinners        CEE        Headway		-- Asher -- Oriel -- Ovens        Blue M exhausted bake        Pre-bake        Hard-bake        Soft-bake -- MJB-3

Contact Suzanne Miller for more information.

(612) 626-2028