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PhotoLithography
Process Information for PhotoLithography
Contact Aligner- Specifications [ PDF 12kB]
- Aligner characterization [ PDF 192kB]
Futurrex Lift-Off Process
- NR1-3000PY data
sheet
[ PDF 120kB]
- Futurrex Data Sheet - Procedure to establish lift-off process [ PDF 62kB]
- Lift-off process examples
- NR1-3000PY [ PDF 163kB]
- NR9-1000PY [ PDF 120kB]
Photoresist Oxygen Ash Rates
- 1813 ash rates [ PDF 50kB]
Photolithography Chemical Information
Photolithography Shortcourse Information
Microlithography from Cornell Nanofabrication Facility (optional reference material).
Please refer to the Shortcourse
Instructor List to contact the instructor/specialist
for more information regarding this instrument